FS Pneumatic Drive Bellows Pumps
Iwaki America’s FS series is a compact, cost-effective, air-driven bellows pump designed for the semiconductor industry, chemical delivery, and recirculation. Rated for all temperatures, this pump easily handles high-temperature nitride etch and piranha etch applications. The FS series features intelligent drive technology and leak sensing, offering significant cost savings over previous models and comes with a 2-year warranty.
Maximum Capacity: Up to 14.5 Gallons Per Minute (GPM)
The FS series is rated for liquid temperatures from 5° to 180°C and can handle discharge pressures up to 73 psi, making it ideal for wet process tools, cleaning, and chemical feed applications. With stroke rates up to 240 spm, the FS series achieves up to 50% higher flow rates in a significantly smaller footprint. Its contamination-free design features all liquid contact parts made of PTFE/PFA.
The anti-torsion air chamber design eliminates the need for retorquing connecting rods. The intelligent sensor drive system in Iwaki America’s FS series uses proximity switches and an external solenoid valve, allowing for easy control and monitoring of pump operations.
FS Pneumatic Drive Bellows Pumps Applications:
- Chemical Delivery
- Semiconductors
- Recirculation
