FA Pneumatic Drive Bellows Pumps
The FA Series bellows pump is designed to meet both low and high flow requirements at temperatures ranging from 5 to 100°C. The FA-2E model is ideal for precise chemical delivery, handling flow rates up to 0.5 gpm (2 L/min).
Maximum Capacity: Up to 10.6 Gallons Per Minute (GPM)
There are two standardized models: the FA-2E, a lateral type for low flow rates, and the FA-40VEW, a vertical type for high flow rates. The FA-2E uses a spray system for single wafer processing, while the FA-40VEW is ideal for cleaning 200/300 mm wafers. All liquid ends are made of fluoropolymers, ensuring purity and corrosion resistance.
The PTFE bellows are durable, offering superior long-term continuous operation and high-pressure resistance. The FA-40VEW features H-shaped thick bellows, providing excellent high-pressure resistance and longevity for continuous use. When connected to a special controller, discharge can be easily controlled and monitored.
The FA-40 pump is perfect for high-volume flow applications, such as large wafer processing, delivering up to 11.6 gpm (50 L/min). Its vertical construction optimizes cabinet space. Additionally, leak detection and drive sensing enhance the reliability and safety of these pneumatic pumps.
FA Pneumatic Bellows Pump Applications:
- Low Flow
- high Flow
- Chemical Delivery
- Industrial Processing
- Circulating
