CFD Chemical Replenishing (Pneumatic Metering) Pumps
The CFD-1T-B boasts significantly improved resolution compared to our previous models. With a minimum flow of 1 mL per shot, it provides enhanced accuracy in chemical condensation control, essential for wafer cleaning processes. The CFD-1T-B ensures precise chemical dosing without overshoot, thereby eliminating excess liquid waste. Additionally, its anti-siphon mechanism prevents unintended siphoning.
Maximum Capacity: Up to 30 mL/Minute
The CFD Series High Purity Pumps offer 1% repeatability, ensuring efficient chemical use and rapid replenishment without exceeding targets. With PTFE and PFA wetted parts, these pumps maintain process purity, complemented by an integral leak detection sensor. They easily integrate with existing process controllers and feature an optical position sensor and built-in leak sensor. The design includes suction and discharge ball check valves, minimizing the need for external fittings and simplifying installation.
CFD Replenishing Pump (Pneumatic Meteting) Applications:
- Chemical Feed
- Metering
